基于硅基液晶的数字光具座技术

Research on Digital Optical Bench Technology Based on LCOS

为实现光具座上各种光学测量的自动化和数字化,将硅基液晶(Liquid Crystal on Silicon,LCOS)微显示器作为目标发生器,加入到光具座测量系统,取代传统的分划板,并以CMOS相机作为图像接收器,构建了数字光具座光学测量系统,提高了系统的灵活性和适应性。针对数字光具座系统的特点,研究了数字图像目标的自动生成方法;基于数字相关原理,运用正弦分布的周期目标,研究了数字图像目标的高精度自动提取算法,实验数据表明该方法的重复性误差为8×10。采用数字拟合求周期的方式,研究小视场光学系统的焦距测量,实验结果表明,该方法相对误差为0.24%,可用于小视场光学系统焦距测量。

In order to realize the automation and digitization of various optical measurements on the optical bench,the LCOS micro-display is used as the target generator and added to the optical bench measurement system to replace the traditional reticle,and the CMOS camera is used as the image receiver to construct the digital optical bench optical measurement system,which improves the flexibility and adaptability of the system.Based on the digital optical bench system,the automatic generation method of the digital image target is studied.Based on the principle of digital correlation,the use of sine-distributed periodic targets,the high-precision automatic extraction algorithm of digital image targets is studied,and good robustness and repeatability error of 8×10-5are shown.The method of calculating the period by digital fitting is used to measure the focal length of the small field of view optical system.The experimental results show that the relative error of this method is 0.24%,which can be used for the focal length measurement of the small field of view optical system.