摘要
在超声振动打孔时,微晶玻璃最大切深决定了孔壁表面质量。基于脆性断裂材料去除机理,建立了简单实用的超声打孔材料去除率理论关系式,得出影响表面质量的主要工艺参数为:金刚石粒径、刀具转速和进给速度。通过正交实验方法,得到了微晶玻璃超声打孔的最佳工艺参数,金刚石粒径650#、刀具转速12000 rpm和进给速度5 mm/min。通过工艺参数优化后,微晶玻璃打孔质量得到明显提升,孔壁经过化学抛光处理后,表面粗糙度Ra达到0.0551μm,能有效提升激光陀螺腔体的真空特性和激光陀螺的性能。
During the drilling with ultrasonic vibration,the dominant factor of the surface quality is the maximum depth of the scratch on the ceramic glass surface.Based on the brittle fracture mode of material removal,the calculation theoretical model is established.The influences of parameters are grit diamond,rotating speed of diamond tool and cutting speed.The best values of which are grit diamond 650#,rotating speed of diamond tool 12000 rpm and cutting speed 5 mm/min based on the orthogonal experiment.It can improve the surface quality of ceramic glass.The obtained results are surface roughness Ra value of hole 0.0551μm after chemical polishing.
作者
刘军汉
熊长新
周杨
刘彦清
LIU Jun-han;XIONG Chang-xin;ZHOU Yang;LIU Yan-qing(Huazhong Institute of Electro-Optics-Wuhan National Laboratory for Optoelectronics,Wuhan 430223,China)
出处
《光学与光电技术》
2022年第3期96-101,共6页
Optics & Optoelectronic Technology
关键词
超声振动
微晶玻璃
最大切深
表面粗糙度
表面质量
ultrasonic vibration
ceramic glass
max depth of the scratch
surface roughness
surface quality
