金刚石聚晶薄膜的场发射性能对比研究

Comparative Study on Field Emission Properties of Diamond Polycrystalline Films

以覆盖金属钛的陶瓷为衬底放入微薄等离子体腔中,在不同的条件下制备出三种金刚石聚晶碳膜。通过扫描电镜、拉曼光谱、X射线仪分析碳膜的形貌与结构,利用二级结构研究碳膜的场发射性能,得到发射性能最佳的薄膜。深入分析了三种碳膜的成因和场发射性能不同的原因,为优秀场发射阴极材料的制备做出一点贡献。

Three kinds of diamond polycrystalline carbon films were prepared under different conditions by placing ceramic substrates covered with titanium into a thin plasma cavity.The morphology and structure of carbon films were analysed by scanning electron microscopy,Raman spectroscopy and X-ray apparatus.The field emission properties of carbon films were studied by secondary structure,and the best emission properties were obtained.The causes of the three kinds of carbon films and the different field emission properties are analysed,which makes some contributions to the preparation of excellent field emission cathode materials.