Interdigital MnO_(2)/PEDOT Alternating Stacked Microelectrodes for High-Performance On-Chip Microsupercapacitor and Humidity Sensing

For microelectronic devices,the on-chip microsupercapacitors with facile construction and high performance,are attracting researchers'prior consideration due to their high compatibility with modern microsystems.Herein,we proposed interchanging interdigital Au-/MnO_(2)/polyethylene dioxythiophene stacked microsupercapacitor based on a microfabrication process followed by successive electrochemical deposition.The stacked configuration of two pseudocapacitive active microelectrodes meritoriously leads to an enhanced contact area between MnO_(2)and the conductive and electroactive layer of polyethylene dioxythiophene,hence providing excellent electron transport and diffusion pathways of electrolyte ions,resulting in increased pseudocapacitance of MnO_(2)and polyethylene dioxythiophene.The stacked quasi-solid-state microsupercapacitors delivered the maximum specific capacitance of 43 mF cm^(-2)(211.9 F cm^(-3)),an energy density of 3.8μWh cm^(-2)(at a voltage window of 0.8 V)and 5.1μWh cm^(-2)(at a voltage window of 1.0 V)with excellent rate capability(96.6%at 2 mA cm^(-2))and cycling performance of 85.3%retention of initial capacitance after 10000 consecutive cycles at a current density of 5 mA cm^(-2),higher than those of ever reported polyethylene dioxythiophene and MnO_(2)-based planar microsupercapacitors.Benefiting from the favorable morphology,bilayer microsupercapacitor is utilized as a flexible humidity sensor with a response/relaxation time superior to those of some commercially available integrated microsensors.This strategy will be of significance in developing high-performance on-chip integrated microsupercapacitors/microsensors at low cost and environment-friendly routes.