高频电感标准器溯源标定方法探讨

Calibration Method Research of Standard Hight-frequency Inductor

通过分析高频电感标准器等效电路和宽频RLC测量仪测量原理,提出基于谐振法的高频电感标准器溯源标定方法.使用标准电容和精密阻抗分析仪作为主标准器,配合测试夹具,借助精密阻抗分析仪电容测量和频率设置能力准确标定电感量.对多套(每套7只)高频电感标准器5mH^5μH(0.1~0.1MHz)进行标定,实验表明:所提出的方法主要要误差来源为电容测量误差,测量结果的不确定度为0.1%~0.7%.

By analyzed of the equivalent circuit of standard hight-frequency inductor and measurement principle of wide frequency RLC meter,a method of tracing calibration of hight-frequency inductor based on the resonance method is proposed.Standard capacitance and precision impedance analyzer are used as the main standard,with a test fixture,and the capacitance measurement and frequency setting ability of precision impedance analyzer are used to accurately calibrate inductance.The experiments on several sets of 5mH^5μH@0.1~10MHz hight-frequency inductors(7 for each set)show that the main error source is capacitance measurement error,and the uncertainty of measurement results is 0.1%~0.7%.