光谱共焦传感器校准方法对比分析

Calibration and Comparison of a Spectral Confocal Sensor

主要对光谱共焦传感器的校准时的误差进行研究.分别利用激光干涉仪与高精度测长机对光谱共焦传感器进行测量,用球面测头保证光谱共焦传感器的光路位于测头中心,以保证光谱共焦传感器的在测量时的安装精度,然后更换平面侧头,对光谱共焦传感器进行校准.用最小二乘法对测量数据进行处理,得到测量数据的非线性误差.结果表明:高精度测长机校准时的非线性误差为0.030%,激光干涉仪校准时的分析线性误差为0.038%.利用最小二乘法进行数据处理及非线性误差的计算,减小校准时产生的同轴度误差及光谱共焦传感器的系统误差,提高对光谱共焦传感器的校准精度.

The error in the calibration of the spectral confocal sensor is mainly studied.The spectral confocal sensor was measured by a laser interferometer and a high-precision length measuring machine respectively,and the spherical probe was used to ensure that the optical path of the spectral confocal sensor was located at the center of the probe to ensure the accuracy of the spectral confocal sensor during measurement,and then replace the planar side head to calibrate the spectral confocal sensor.The measurement data was processed by the least squares method to obtain a nonlinear error of the measured data.The results showed that the nonlinear error of the high-precision length measuring machine is 0.030%,and the analytical linear error of the laser interferometer is 0.038%.The least squares method was used for data processing and nonlinear error calculation,which reduced the coaxiality error generated during calibration and the systematic error of the spectral confocal sensor,and improved the calibration accuracy of the spectral confocal sensor.