激光跟踪干涉仪在坐标测量机检测中的应用

Application of Laser Tracking Interferometer in Tests of Coordinate Measuring Machines

激光跟踪干涉仪具有自跟踪功能,测量空间对角线时相对激光干涉仪更方便,因此对激光跟踪干涉仪检测坐标测量机的原理和方法开展研究.对激光跟踪干涉仪采用不同分布开展了基站坐标自标定实验,得到基本一致的基站站位坐标;在此基础上开展了激光跟踪干涉仪和激光干涉仪的应用对比实验.实验结果表明二者测量500 mm长度的最大差值为0.37μm,线性补偿后小于0.1μm.因此验证了激光跟踪干涉仪检测方法的正确性和可行性,为坐标测量机检测提供了一种更便捷的方法,尤其适用于受实物标准器尺寸限制的大型坐标测量机检测.

Laser tracking interferometer has self-tracking function,it is more convenient when measuring the diagonal of space compared to laser interferometer.And so Laser tracking interometer is used to test coordinate measuring machines,the corresponding principle and method are proposed and analyzed.Base station coordinate self-calibration experiments were carried out for Laser tracking interometer with different distributions,and the base station coordinate was basically the same,and on this basis,the comparative experiments of Laser tracking interometer and laser interferometer were carried out.The experimental results show that the maximum deviation is 0.37μm when measuring length of 500 mm,it decreases to 0.1μm after linear compensation.Therefore,the correctness and feasibility of the detection method of laser tracking interometer are verified,which provides a more convenient method for coordinate measuring machines tests,and this method is especially suitable for large-scale coordinate measuring machines tests,where the physical standards are restricted as the limited size.