5HAN K H, CHO Y H. Self-balanced navigation-grade capaci- tive micro-aecelerometers using branched finger electrodes and their performance for varying sense voltage and pressure [J]. Journal of Microelectromechanical Systems, 2003, 12 ( 1 ) : 11 - 20.
61293-1998, Standard specification format guide and test pro- cedure for linear, single-axis, nongyroscopic accelerometers [S]. IEEE Aerospace and Electronic Systems Society, 1999.
7WU J F, CARLEY L R. Electromechanical EA modulation with high-Q micromechanical accelerometer and pulse density modulated force feedback[J]. IEEE Transactions on Circuits Systems I: Regular Papers, 2006, 53 ( 2): 274-287.
8COMI C, CORIGLIANO A, LANGFELDER G, et al. A reso- nant microaccelerometer with high sensitivity operating in an os- cillating circuit[J], Microelectromech Syst, 2010, 19 ( 5): 1140- 1152.
9JIA Y B, HAO Y L, ZHANG R. Bulk silicon resonant acce- lerometer[J]. Chinese Journal of Semiconductors, 2005, 26 (2) : 281 - 285.
10KULAH H, CHAE J, YAZDI N, et al. Noise analysis and characterization of a delta-sigma capacitive microaccelerometer[J]. IEEE Journal of Solid-State Circuits, 2006, 41 (2).. 352 - 361.
