大口径数字波面检测技术的研究

Reserch on technique of large aperture-digital wavefront test

现代光学系统多采用大口径的光学元件来提高系统的测试精度。数字波面干涉仪是一种高精度光学元件检测设备,但目前传统的技术无法满足检测大口径光学元件的要求。在普通数字波面干涉仪的基础上,采用目标函数多孔径拼接技术,能很好地解决大口径光学元件检测问题,最终得到较完整的波前信息。

To improve test precision modern optical system often uses optical element of large aperture.The digital interferometer of wavefront is the instrument of testing optical element precisionly,but the method of tradition can′t meet the requirement of testing large aperture optical element.Muti-aperture Overlap-scanning Technique(MAOST) and target function can solve the problem of testing a large optical surface on the basis of ordinary digital interferometer of wavefront,and get the most information of wavefr...