真空测量中热偶规传感器的非线性特性校正

Nonlinear Compensation of Thermocouple Circular Canal Sensor in the Vacuum Measurement

本文介绍了一种基于三次样条插值的真空测量非线性校正方法,讨论了三次样条插值函数的建立及在计算机系统上的实现,对插值结果进行了分析,最后将结果以表格方式存入到飞思卡尔单片机的Flash中,在单片机程序中采用查表方法获取相应的校正函数。结果表明该方法具有精度高、速度快等特点,具有良好的推广应用价值,是切实可行的。

A method of nonlinear compensation of vacuum measurement based on cubic spline interpolation is presented in the paper. The establishment of cubic spline interpolation function and the implement on the computer system is discussed, and interpolation re-sult is analyzed in the paper. Finally the result is saved in the way of table into the Flash of Freescale MCU. The relevant compen-sation function is obtained by the method of table in the program. The results show that the method has the traits of high precision and quick rate, and has well value to be extended and is feasible.