小面积X射线荧光涂层测厚仪

X-RAY FLUORESCENCE THICKNESS GAUGE FOR SMALL AREA COATING

一、引言在某些产品或零部件表面涂(镀)一层很薄的保护层,是提高其耐磨性,耐蚀性或改善外观装饰的有效方法之一。由于该涂层的厚度不仅影响产品质量和成本,还与它本身的性质密切有关,因此无论是研究涂层本身的性质、结构和涂复工艺。

This paper simply describes a new module of XFR coating thickness gauge for small area.An X-ray generator emits radiation with much higher intensity and broader energy region than that from radioisotope sources often used in previous modules. The area of measurement is as small as less than 0.5mm in diameter, and it is able to determine the thickness of different elements from single layers, multiplex layers, and alloy layers. The results are treated by a computer and printed on paper.