多孔硅/聚合物复合膜光学各向异性的研究

Study on optical anisotropy of porous silicon/polymer composite films

首次用二维圆柱孔模型研究了多孔硅/聚合物复合膜的光学各向异性,求出了光学各向异性参数。实验上制备出了多孔硅/PMMA复合膜平面波导,采用棱镜耦合m线方法测量了复合膜的折射率。理论分析与实验结果基本相符。研究结果表明,多孔硅膜呈现出正单轴晶体的特征,由TE和TM模射所确定的折射率分别对应寻常光折射率和非寻常光折射率。多孔硅/PMMA复合膜光学各向异性随聚合物嵌入率的增加而减小。光学各向异性也随孔隙率的不同而变化,当初始孔隙率为73%时,光学各向异性参数β取最大值。

Optical anisotropy of porous silicon(PS)/polymer composite film was studied by two dimension model of cylindrical pores in this paper,and optical anisotropy parameter was calculated first time.In experiment,the planar waveguide based on PS/polymer composite film was fabricated,and the equivalent refractive indices of composite film were measured by m-line method.The theoretical results were consistent to experimental results.It shows that porous layer appears as a positive uniaxial material.The two refracti...