摘要
脉冲激光沉积是近年来出现的一项制备薄膜的新技术,在制备生物活性陶瓷涂层方面显示出独特的优越性。介绍了脉冲激光沉积技术的原理及特点,对其在制备羟基磷灰石及生物玻璃涂层中的应用和研究现状分别进行厂综述,详细分析了反应气氛、激光波长、能量密度、基体温度及靶材性能等工艺参数对羟基磷灰石薄膜组织及性能的影响,展望了该项技术的应用前景。
Pulsed laser deposition is a new technique for producing thin film in the recent years.It shows the unique advantages for the deposition of bioactive ceramic.The mechanism and characteristics of the pulsed laser deposition technique are introduced.Its applications and current research status in HA and biogiass thin films are reviewed respectively.The effect of various parameters of the PLD process on the structures and the properties of the HA film,including atmosphere,substrate temperature,laser wavelength...
出处
《激光杂志》
CAS
CSCD
北大核心
2006年第5期84-86,共3页
Laser Journal
基金
山东省优秀中青年科研奖励基金资助项目。编号:02BS056