光学薄膜的计算机高精度监控

High Precision Monitor of Optical Film by A Computer Institute of Optics and Electronics

本文针对λ/4膜系的极值监控法的特点,给出了一个由计算机实施的高精度监控的数学模型。计算机在依据该模型建立的程序的引导下,自动完成光学薄膜的高精度监控。在比较宽松的条件下,实现了千分之三的监控精度,而且系统不再需要对光源进行调制,结构被大大的简化。

According to the characteristic of 1/4 wavelength thin film a mathematic model performed by a computer to realize high controlling accu- racy is given in this paper. It has proved that this method can simplify the monitoring devices,and im- prove the controlling accuracy.Under not strict condition of out experiment, the controlling accuracy of 3/1000 is achieved.The optical modulation is no longer necessary,so the whole device is very simple.