RPCVD SnO_2薄膜气敏元件初探

SnO_2 Thin Film Gas Sensor By RPCVD Method

本文介绍用等离子体激活化学气相淀积(RPCVD)方法在平板陶瓷基片上淀积纯SnO_2,得到稳定性好,工作温度低及灵敏度高的薄膜气敏元件。研究了该元件对H_2、C_2H_5OH,LPG 及CO 等气体的气敏效应,以及元件的稳定性和湿敏特性。提出了采用分子筛选膜的多层结构来改善选择性的设想。与烧结型元件相比,肯定了薄膜型元件是一种很有希望的气敏元件。

Pure tin Oxide thin film is deposited on a ceramic substrate by the plasna excited chenical vapor deposition(RPCVD)method to prepare a new gas sensor.This gas sensor exhibits both good stability and high sensitivity,and the working temperature is lower than the traditional SnO_2 gas sensors.The response characteristics towards H_2,alcohol,LPG,and CO are studied as well as the stability of this sensor.Besides its sensing property towards humidity is also given.In order to improve its select...