摘要
综述了近年来ZrN系列薄膜的研究现状,描述了ZrN薄膜的重要性质,介绍了以ZrN薄膜为基础的多层膜和复合膜的研究状况,分析了制备方法及工艺条件对薄膜的影响,并展望了ZrN薄膜未来的研究方向。
The resent development of the research in the film series of ZrN was summarized and the several initial properties of the ZrN film were described. In addition,the multi-layer and the composite films based on the single ZrN film were also analyzed. The influence of preparation methods and technological conditions on the films was analyzed. At last,the future development trend of ZrN film was presented.
出处
《工具技术》
北大核心
2007年第7期7-12,共6页
Tool Engineering
关键词
ZRN
薄膜
多层
复合
ZrN
film
multi-layer
composite
