平面度误差各种评定方法的比较

Comparison of Various Evaluating Methods for Flatness Error

介绍了平面度误差各种评定方法的原理,并对各种评定方法对同一被测平面的平面度误差评定结果及数据处理难度进行了比较。结果表明,最小二乘法的评定结果比较接近最小区域法,且数据处理简便,对测量采样点的布置无特殊要求。

Principles of various evaluating methods of flatness error are introduced. The evaluating results and degrees of difficulty in data processing to evaluate the flatness of same plane with various methods are compared. Results indicate that the evaluating result with least-squares procedure is close to that with least-field method, and the data processing is simple and easy to implementation, and not specific requirements on layout of sampling points.