摘要
基于误差消除的逆向求解思想,将DFP多维变尺度法应用于超精密高次非球面镜测量数据的面形误差分析中。通过坐标变换,建立了包含误差的标准曲线的变形方程。结合非线性最小二乘法,对测量数据进行了曲线拟合以获取参数值和面形误差的PV值。用C++语言实现了该算法。实例计算表明,该算法具有快速收敛性和稳定性,能满足超精密加工的精度要求。
Based on the idea of inverse solution on the error elimination, the DFP multi-dimensional variable scale algorithm are applied on the surface shape’s error analysis of ultra-precision high-order aspheric lens. Through the coordinates transformation, the standard-curve-based modified equation which contains errors are established. The curve fitting for the measuring data are carried out with the non-linear least squares method to obtain the parameter values and PV value of surface shape’s errors. The algorit...
出处
《工具技术》
北大核心
2007年第8期85-88,共4页
Tool Engineering
关键词
非球面镜
误差分析
变尺度法
非线性最小二乘法
aspheric lens
error analysis
variable scale algorithm
non-linear least squares method
