用粉碎法制备SiC板晶

PREPARATION OF SiC PLATELET BY USING COMMINUTING METHOD

通过对ＳｉＣ的细磨、超细分级与按形状分离的方法，探讨了用粉碎法制备ＳｉＣ板晶的可行性。本实验采用了行星磨、振动磨、球磨、瓷瓶磨等四种不同的粉磨设备，在不同的实验条件下粉磨工业ＳｉＣ原块至平均粒径为１．５μｍ。通过对粉磨产品的粒度分布、平均粒径的测定，和ＳＥＭ、ＴＥＭ电镜观测，发现粉磨产品的形貌及板晶的含量与磨机种类、作用方式及操作条件有关。利用不同粒径颗粒在介质中沉降速度的差异，把ＳｉＣ粉末分成若干个粒级，找出不同粒级与板晶含量的关系，并对同一粒级的颗粒再进行按形状分离，使板状晶体含量达到３０％以上。

The preparation of SiC platelet by means of mechanical grinding, classification and separation in accordance with shape were discussed in this paper in order for using mechanical method in stead of chemical vapor deposition to prepare SiC platelet. The industrial SiC was pulverized with different kinds of grinding mill under different experimental conditions so as to find the optimum conditions under which a large amount of SiC platelet could be obtained.In order to obtain more platelets it was suitable to ...