八梁硅微加速度传感器横向灵敏度的研究

Analysis of Transverse Sensitivity in Eight-beam Piezoresistive Micro-accelerometer

一般的压阻式硅微加速度传感器结构多采用悬臂梁加质量块的形式,这种结构的传感器有很高的灵敏度,但它会产生很高的横向效应。文中介绍一种八梁结构的三轴加速度传感器,通过用ANSYS有限元分析软件仿真计算,说明该结构的加速度传感器具有很小的横向效应。

The general piezoresistive silicon micro acceleration instrument structure uses the cantilever beam to add the quality block much the form, This kind of Micro Accelerometer has the very high sensitivity, But it also have the very high crosswise effect. In the article introduces one kind of eight- beam and three axles Micro Accelerometer, through uses the ANSYS software simulation to calculate, Explained the acceleration instrument of this structure has the very small crosswise effect.