摘要
一种基于MEMS技术的新型光纤连接器,在硅V型槽上方集成制造电沉积镍薄膜金属盖板,其两端喇叭口形导引通道方便光纤插拔,中间平直部分的夹持通道实现光纤的定位和精确自对准.该器件体积小巧、可集成制造并且重复性好,测试的插入损耗值小于0.3dB.对此自适应式可集成制造光纤连接器的结构设计和制作工艺作了着重介绍.
An optical fiber connector based on MEMS technology is presented.Nickel thin film cover plate is integrated manufactured above the silicon V-shaped groove.The bell-mouthed crimping channel facilitates the insertion and pulling of optical fiber.The clamping channel of the middle flatly segment makes the precise position and self splicing come true.The devices are not only small and integrated manufacturable but well reproducible as well.The insertion loss is less than 0.3 dB.The microstructure design keys an...
出处
《电子器件》
CAS
2007年第2期426-429,共4页
Chinese Journal of Electron Devices
基金
上海市光科技专项课题资助(DZ46105008)
国家自然科学基金资助(10377009)
关键词
光纤元件
光纤连接器
MEMS
集成制造
自适应盖板
optical fiber component
optical fiber connector
MEMS
integrated manufacturable
self-adaptable cover plate