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基于MEMS工艺的集成光纤连接器

MEMS-Based Integrated Optical Fiber Connector
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摘要 一种基于MEMS技术的新型光纤连接器,在硅V型槽上方集成制造电沉积镍薄膜金属盖板,其两端喇叭口形导引通道方便光纤插拔,中间平直部分的夹持通道实现光纤的定位和精确自对准.该器件体积小巧、可集成制造并且重复性好,测试的插入损耗值小于0.3dB.对此自适应式可集成制造光纤连接器的结构设计和制作工艺作了着重介绍. An optical fiber connector based on MEMS technology is presented.Nickel thin film cover plate is integrated manufactured above the silicon V-shaped groove.The bell-mouthed crimping channel facilitates the insertion and pulling of optical fiber.The clamping channel of the middle flatly segment makes the precise position and self splicing come true.The devices are not only small and integrated manufacturable but well reproducible as well.The insertion loss is less than 0.3 dB.The microstructure design keys an...
出处 《电子器件》 CAS 2007年第2期426-429,共4页 Chinese Journal of Electron Devices
基金 上海市光科技专项课题资助(DZ46105008) 国家自然科学基金资助(10377009)
关键词 光纤元件 光纤连接器 MEMS 集成制造 自适应盖板 optical fiber component optical fiber connector MEMS integrated manufacturable self-adaptable cover plate
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参考文献6

  • 1赵仲刚,陈光辉.光纤连接器发展现状[J].光纤与电缆及其应用技术,2003(2):10-13. 被引量:7
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二级参考文献2

  • 1秦大甲.光纤连接器套管材料的开发[A]..中国光纤器件发展研讨会论文集[C].,2002.188—193.
  • 2陈光辉.新型金属插针光连接器的性能研究[A]..中国光纤器件发展研讨会论文集[C].,2002.178—182.

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