基于MEMS工艺的碳纳米管(碳纳米纤维)铜微异型触点

MEMS-Based Carbon Nanotube and Carbon Nanofiber Copper Micro Special Electric Contact

一类为保护MEMS微继电器、提高它们使用寿命,而设计生产的微异型触点.该类微异型触点利用MEMS工艺,对铜基碳纳米管及碳纳米纤维复合电镀层进行细微图形化加工而成.一系列测试表明,铜基碳纳米管及碳纳米纤维复合电镀层本身具有良好的电接触性能,而利用MEMS工艺表面细微图形化加工后的微异型触点,比未经图形化加工的复合电镀层及纯铜触点具有更好耐电弧磨损性能.

To protect MEMS micro relay,this paper designed and produced a new kind of micro special electric contact.Carbon nanotube and carbon nanofiber copper composite films were processed by MEMS fabrication to achieve these micro special electric contacts.After series testing,it was found that carbon nanotube and carbon nanofiber copper composite films got excellent electric contact properties,and the arc erosion characteristic of micro special electric contact processed by MEMS fabrication was better than that o...