摘要
设计并制作了高性能GaAs微波PIN二极管.分析了GaAsPIN二极管的结构对其性能的影响,并根据分析结果改进了GaAsPIN二极管的结构.制作了常见结构和改进结构的GaAsPIN二极管,比较了不同结构的GaAsPIN二极管的测试数据,从而验证了理论分析的结果.改进后的GaAsPIN二极管制作工艺更为简单,具有良好的高频特性,截止频率达到1520.5GHz.这种改进结构的GaAs微波PIN二极管在微波电路中具有良好的应用前景.
A kind of high performance GaAs microwave PIN diode was designed and fabricated.The relationship between the performance and the structure of GaAs PIN diode is analyzed.An improved structure of GaAs PIN diode is present.GaAs PIN diodes with different structures are fabricated,testing data of PIN diodes with usual and improved structures are compared,and the results of analysis in theory are proved.The improved GaAs PIN diodes are easier to fabricate,and has better high frequency performance.The cut-off freq...
出处
《电子器件》
CAS
2007年第5期1552-1554,共3页
Chinese Journal of Electron Devices