期刊文献+
任意字段
题名或关键词
题名
关键词
文摘
作者
第一作者
机构
刊名
分类号
参考文献
作者简介
基金资助
栏目信息

MEMS微波功率传感器的共面波导优化设计

Optimal Design of CPW in MEMS Microwave Power Sensor
下载PDF
导出
摘要 归纳了目前存在的一些减小共面波导损耗的方法,用HFSS模拟了这些方法的插入损耗和回波损耗.根据微波功率传感器的特点选取了二氧化硅隔离层的结构来制作共面波导,指出了这种结构存在的缺陷,并运用半导体物理的知识解释了造成缺陷的原因,最后提出了改进结构并通过HFSS模拟证实了这些结构的正确性.从最终的结果来看,三种优化结构得到的插入损耗绝对值均减小到了0.6dB以下,回波损耗也降到了-30dB以下. Some methods of reducing losses of CPW were summarized.By using the HFSS software,we simulated the insert loss and return loss of CPW of these methods.Then the structure of using isolated SiO2 were chosen as the optimal method considering the characteristic of microwave power sensors,but there also existed some disadvantages in this method and was explained with the knowledge of semiconductor physics.Lastly,some improvements were brought forward,which were verified to be right by using HFSS.From the result ...
作者 田涛 廖小平
机构地区 东南大学MEMS教育部重点实验室
出处 《电子器件》 CAS 2007年第5期1559-1562,共4页 Chinese Journal of Electron Devices
基金 国家自然科学基金资助项目(60676043)
关键词 微波功率传感器 共面波导 优化 二氧化硅隔离层 插入损耗 回波损耗 microwave power sensor CPW optimization isolated SIO2 insert loss return loss
分类号 TP212 [自动化与计算机技术—检测技术与自动化装置]
  • 相关文献

参考文献11

  • 1[1]Milanovic V,Gaitan M,Bowen E D.Thermoelectric Power Sensor for Microwave Applications by Commercial CMOS Fabrication[J].IEEE Electron Device Letters,1997,18 (9):450-452.
  • 2[2] Dehe A,Krozer V,Fricke K,Klingbeil H.Integrated Microwave Power Sensor[J].IEEE Electron Device Letters,1995,31 (25):2187-2188.
  • 3[3]Dehe A,Krozer V,Chen B,Hartnagel H L.High-Sensitity Microwave Power Sensor for GaAs-MMIC Implementation[J].IEEE Electron Device Letters,1996,32 (23):2149-2150.
  • 4[4]Dimitri Lederer,Raskin Jean-Pierre.Substrate Loss Mechanisms for Microstrip and CPW Transmission lines on Lossy Silicon Wafers[J].Solid-State Electronics,2003,47(2003):1927-1936.
  • 5[5]George E.Ponchak,Alan N.Downey,Linda P.B.Katehi.High Frequency Interconnects on Silicon Substrates[C]//IEEE Radio Frequency Integrated Circuits Symposium,1997:101-104.
  • 6[6]Reyes Adolfo C,El-Ghazaly Samir M,Dorn Steve J,Michael Dydyk.Coplanar Waveguides and Microwave Inductors on Silicon Substrate[J].IEEE Transactions on Microwave Theory and Techniques,1995,43(9):2016-2022.
  • 7[7]Ponchak George E,Alexandros Margomenos,Linda P.B.Katehi.Low-Loss CPW on Low-Resistivity Si Substrates with a Micromachined Polyimide Interface Layer for RFIC Interconnects[J].IEEE Transactions on Microwave Theory and Techniques,2001,49(5):866-870.
  • 8[8]Veljko Milanovi'c,Michael Gaitan,Edwin D.Bowen.Micromachined Microwave Transmission Lines in CMOS Technology[J].IEEE Transactions on Microwave Theory and Techniques,1997,45(5):630-635.
  • 9[9]Nam Choong-Mo,Kwon Young-Se.Coplanar Waveguides on Silicon Substrate with Thick Oxidized Porous Silicon (OPS) Layer[J].IEEE Microwave and Guided Wave Letters,1998,8(11):369-371.
  • 10[11]Gamble H S,Armstrong B M,Mitchell S J N.Low-Loss CPW Lines on Surface Stabilized High-Resistivity[J].IEEE Microwave and Guided Wave Letters,1999,9(10):395-397.
电子器件
2007年 第5期

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部