摘要
介绍了一种电容极板固定于同一平面的变面积电容原理的非接触式角度传感器.传感器借助于多相激励信号源在极板上产生平面位置信号,通过过渡极板耦合形成对应于角位移信号的合成电场,利用合成信号与基准信号鉴相比较实现以角位移信号的测量.通过模型仿真和样品试验,验证了原理设计的可行性,并在误差分析基础上给出了减小误差的方法.传感器具有固定侧出线、低成本和测量区域及性能可拓展等特点.
A noncontact area-changing capacitive angular sensor is introduced whose boards are fixed on the same plane. The angle measurement is achieved by the phase demodulation between the synthesized signal and the benchmark signal. The measurement recurs to the plane position which is generated on the boards with the multiphase excitation signal source, and the synthesized electric field corresponding to angular displacement which is formed by the transition boards coupling. The feasibility of the design is valid...
出处
《电子器件》
CAS
2007年第6期2108-2111,共4页
Chinese Journal of Electron Devices
基金
浙江省重点科技计划项目(编号2003C21032)
关键词
角度传感器
合成电场
变面积
误差分析
angular sensor
synthesized electric field
area-changing
error analysis