一种L、S波段微机械压控振荡器

A MEMS Voltage Controlled Oscillator for L,S Band Application

报道了一种中心频率为2GHz的电感电容(LC)压控振荡器,其谐振回路由微机械可变电容和键合线电感构成。微机械可变电容采用与集成电路兼容的表面微机械工艺制造,在2GHz时其Q值约为32.6,当调节电压从0V增大到12V时,电容量变化范围为25%。通过键合技术将微机械可变电容与有源电路集成在一起,制备了MEMSVCO器件,测试结果表明,载波频率为2.004GHz时,VCO的单边带相位噪声为-103.5dBc/Hz@100kHz,输出功率为12.51dBm。调频范围约为4.8%。

A 2 GHz LC voltage controlled oscillator(VCO) based on micromachined variable capacitor and bonding wire inductors is demonstrated in this paper.The MEMS-based variable capacitors are fabricated in a IC-compatible,surface micromaching process.The variable capacitors have a maximal Q factor of 32.6 at 2 GHz with a 25% tuning range when the tuning voltageis swept from 0 to 12 V.After the micromachined variable capacitor is bonded together with the active circuit,the MEMS VCO devices are obtained.The prototype...