微小型高分辨率光纤光谱仪在等离子体领域的应用

Application of Compact High Resolution Fiber Spectrometer to Plasma Measurement

等离子体是继气体、液体、固体后的第4种物质聚集态。等离子体物理学是一门蓬勃发展的新兴学科,其应用领域包括受控热核聚变、空间科学、环境科学、微电子与信息产业、材料合成与处理、国防和高技术应用等诸多方面。目前,测量等离子体最简单的方法就是使用荷兰Avantes公司的微小型、高分辨率、多通道光纤光谱仪。

Plasma is the forth kind matter aggreagate state after gas,liquid and solid.It is applied widely in the areas covering thermal-controlled nuclear fusion,space science,environmental science,micro electronics ,information technology,material synthesis and processing,national defense and high tech.The paper describes a compact high resolution multi-channel fiber spectrometers made by Avanters,Holand,it is the most simple method to measure plasma.