纳米压痕法测试压痕蠕变的应用研究

Investigation on Indentation Creep by Depth Sensing Indentation

阐述压痕蠕变的研究进展及其测试原理,并且采用纳米压痕仪对Ta,N i和N i基高温合金三种金属体材料、BaTiO3陶瓷和Ag/Co多层薄膜进行蠕变实验,分析蠕变应力指数和相应的蠕变机制。

The measurement principles of indentation creep by depth sensing indentation were elucidated,and recent progresses in investigation on indentation creep were also introduced.The creep behavior of metallic materials such as Ta,Ni and Ni-based alloy,BaTiO_3 and Ag/Co multilayers were measured by depth sensing indentation.The stress exponents and the corresponding creep mechanism were also analyzed.