摘要
以正硅酸乙酯为源物质,空气为载气,采用常压化学气相沉积法在HP40(25Cr35Ni)合金钢基体上制备了SiO2涂层;研究了沉积温度、源物质温度以及气体流量等工艺参数对沉积速率的影响,并通过XRD和SEM分析了涂层的物相组成及表面形貌。结果表明:用此方法可在HP40钢表面沉积出表面均匀致密且与基体具有一定结合强度的涂层,较合理的工艺参数为源物质温度60℃、沉积温度800℃、气体流量3.33 L.min-1。
SiO2 functional coatings with TEOS as substrate and air as carrier gas were prepared on steel HP40(25Cr35Ni) by means of atmospheric pressure chemical vapor deposition(APCVD).The effects of disposition temperature,substrate temperature and carrier gas flow on the deposition rate of SiO2 functional coatings were investigated,and SiO2 functional coatings were studied by means of XRD and SEM.The results show that 60 ℃ substrate temperature,800 ℃ deposition temperature and 3.33 L·min-1 gas rate are the appropri...
出处
《机械工程材料》
CAS
CSCD
北大核心
2008年第4期40-42,53,共4页
Materials For Mechanical Engineering
