基于MS3110的差分电容检测方法研究及其电磁兼容性设计

Research on Detection of Differential Capacitance Based on MS3110 and EMC Design

介绍了电容检测芯片MS3110的内部结构与基本原理,设计了MS3110的参数设置电路与程序,并利用MS3110设计了某插齿式电容微加速度计的信号检测电路,并对检测电路的电磁兼容性进行了专门设计,在转台上对该微加速度计的性能进行了测试,测试结果表明:该微加速度计的测量线性度为1.3%,刻度因子为0.185 V/g.

MS3110 is a universal capacitive readout IC,and its configuration and operating principle were introduced.The circuit and program for setting its parameters were designed,and a detection circuit for a capacitive comb microaccelerometer was designed using MS3110,and EMC design was made for the detection circuit.The performance of this microaccelerometer was tested on a rotating floor,and the test result shows that the measuring linearity of the microaccelerometer is 1.3% and the scale factor is 0.185 V/g.