SED的磁控溅射法制作技术试验研究

Research on SED Fabrication with Magnetron Sputtering

介绍了表面传导电子发射显示(SED),采取了一种使用PdO膜和ZnO膜磁控溅射制作SED的方法,它具有发射均匀的优点。SED器件的电极厚度、导电膜材料、导电膜宽度对发射性能有很大影响,文中对这些参数进行了讨论。通过参数的优化,得到了稳定、均匀的电子发射。

A novel method for fabrication of the surface-conduction electron-emitter display (SED) with magnetron sputtering is demonstrated, which has the advantage of uniform. Parameters include thickness of device electrodes, materials and width of the conducting film which influent the performance of SED are discussed. Through optimization of these parameters, stable and uniform electron emission has been obtained.