钝化处理对CdZnTe Γ射线探测器漏电流的影响

The Effect of Surface Passivation on Leakage Current of CdZnTe Γ-ray Detector

表面漏电流引起的噪声会限制CdZnTe探测器的性能 ,尤其对于共面栅探测器 ,漏电噪声的大小与器件的电极设计和表面处理工艺密切相关。研究了化学钝化的工艺条件对CdZnTe表面状态的影响 ,借助原子力显微镜、电子探针和微电流测试仪等手段 ,研究了CZT表面形貌、组成等特性与器件电学性能之间的关系 。

The noise caused by surface leakage current will greatly influence the performance of CdZnTe (CZT) Γray detector. As for CZT coplanargrid detector, the value of surface leakage current is determined by the design of electrode and surface treatment process. With the help of AFM,EPMA and microcurrent test instrument, the dependence of electrical properties of the detector on surface topography and composition of CZT is analyzed. The results show that the surface leakage current of the detector is greatly ...