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硅微悬臂梁谐振器的电激电拾方法研究 被引量：2

Electro-thermally Excited Silicon Microcantilever Resonator Using Piezo-resistor Detection Method
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摘要 　采用电热激励、压电拾取方法对硅微机械悬臂梁的谐振性能进行了实验研究。成功实现了对硅微悬臂梁谐振器前三阶振型的实验测试。电热激励利用在硅微机械悬臂梁表面优化设计的热激励电阻加以实现。为拾取硅微悬臂梁的微弱谐振信号,在硅微悬臂梁表面优化设计并制作了压敏电阻全桥,利用压敏电阻的压电效应实现对谐振微弱信号的拾取。 The resonant characteristics of the silicon micro-cantilever resonator were investigated under electro-thermal resistor excitation. The weak resonant signal was picked up by piezo-resistor Wheatstone bridge designed and fabricated on the silicon micro-cantilever. The first three resonant modes were successfully detected by using above exciting and sensing method. The resonant characteristics of the silicon micro-cantilever are useful for further applications in micro-electro-mechanical systems.
作者 刘月明 田维坚 刘君华
机构地区 西安理工大学机械与精密仪器工程学院 中国科学院西安光学精密机械研究所 西安交通大学电气工程学院
出处 《半导体光电》 CAS CSCD 北大核心 2003年第6期389-391,414,共4页 Semiconductor Optoelectronics
基金 陕西省教委专项科研计划项目(02JK155) 中国博士后基金项目 (2 0 0 2 0 3 2 2 2 5) 王宽诚博士后基金 中国科学院"百人计划"基金资助项目
关键词 硅微机械悬臂梁 电热激励 压电拾取 谐振特性 silicon micro-cantilever electro-thermal excitation piezo resistor detection resonant characteristics
分类号 TN752 [电子电信—电路与系统]
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参考文献6

  • 1[1]Pereira S, Chak P, Sipe J E. Gap-soliton switching in short microresonator structures[J]. J. Optical Society of America B, 2002, 19(9): 2 191-2 202.
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同被引文献47

  • 1王晓东,王涛,李楠,刘梦伟,崔岩,王立鼎.一种MEMS微结构谐振频率的测试技术[J].传感技术学报,2006,19(05A):1538-1541. 被引量：6
  • 2Yang Z C, Wang Q M. Transient response of piezoelectric thin-film vibration sensor under pulse excitation[J]. Journal of Applied Physics, 2006, 99: 014107.
  • 3Zhang P Q, Tang X L, Shan B X, et al. Analytical and experimental modal analysis for operational validation and calibration of a miniature silicon sensor[J]. Journal of Sound and Vibration, 1998, 214(5): 903-913.
  • 4Keawboonchuay C, Engel T G. Design, modeling, and implementation of a 30 kW piezoelectric pulse generator [J]. IEEE Transactions On Plasma Science, 2002, 30(2): 679-686.
  • 5Amraoui Y M, Lieven N A J. Noncontacting excitation and measurement of light structures [J]. Journal of Vibra tion and Acoustics, 2003, 125: 114-119.
  • 6Vollmann J, Profunser D M, Meier A H, et al. Pulse laser acoustics for characterization of inhomogeneities at interfaces of microstructures [J]. Ultrasonic, 2004, 42: 657-663.
  • 7Lucklum F, Hauptmann P, Rooij N F. Magnetic direct generation of acoustic resonances in silicon membranes [J]. Measurement Science and Technology, 2006, 17: 719-726.
  • 8Degertekin F L, Hadimioglu B, Sulchek T, et al. Actuation and characterization of atomic force microscope cantilevers in fluids by acoustic radiation pressure [J]. Applied Physics Letters, 2001, 78(11): 1628-1630.
  • 9Baek C W, Kim Y K, Ahn Y, et al. Measurement of the mechanical properties of electroplated gold thin films using micromachined beam structures [J]. Sensors and Actuators A, 2005, 117:17-27.
  • 10Osterberg P M, Senturia S D. M-TEST: A test chip for MEMS material property measurement using eleetrostatically actuated test structures [J]. Journal of Microelectromechanical Systems, 1997, 6(2): 107-118.

引证文献2

二级引证文献5

半导体光电
2003年 第6期

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