摘要
讲述采用栅网光刻-成形球面-翻边-定型工艺解决了带翻边球冠形栅网加工的问题,与常规电火花加工栅网方法相比,该方法具有省时、高效、低成本的特点。
The method of photolithography-forming sphere-flanging-finalizing shape is introduced to fabricate special spherical grids.Comparing with traditional electrical discharge machining,it has the advantages,such as time-saving,high efficiency and low cost.
出处
《真空电子技术》
2007年第4期91-93,共3页
Vacuum Electronics
关键词
栅网
电火花加工
光刻-成形-翻边-定型
Grid
Electrical discharge machining
Photolithography-forming sphere-flangingfinalizing shape
