单振子双腔体无阀压电泵结构设计与机理分析

Structural design and mechanism analysis of a valveless piezoelectric pump with single bimorph and double chambers

提出了一种单振子双腔体无阀压电泵,应用小挠度弹性弯曲理论导出了圆形复合压电振子的弹性曲面微分方程,分析了采用一个压电振子形成两个工作腔体压电泵的结构和工作机理,并与单振子单腔体压电泵对比分析了该结构与输出流量的关系。设计研制了结构独特、输出性能更高的单振子双腔体无阀压电泵,通过试验表明:单振子双腔体无阀压电泵比单振子单腔体无阀压电泵输出流量有明显提高。

A valveless piezoelectric pump with single bimorph and double chambers was put forward for improving its flow rate. Some elastic curved surface differential equations of circular piezoelectric composite laminates were derived from the theory on the elastic thin plate bending with small deflection. The structure and working principle of the piezoelectric pumps consisted of one PZT bimorph to fabricate two chambers were introduced. The relations of structure and flow rate were analyzed by comparing with the single bimorph and single chamber piezoelectric pump. The valveless piezoelectric pump with single bimorph and double chambers was designed and fabricated. It has unique structure and high flux output. Experimental results show that the flow rate of piezoelectric pump with single bimorph and double chambers is obviously improved comparing with the flux output of the single bimorph and single chamber piezoelectric pump.