摘要
四极质谱计是一种分压力测量仪器,可广泛应用于残余气体分析和真空流量的测量,其计量特性需要深入研究。用N2、Ar、He3种气体作为实验气体,对4台应用范围较广、具有一定代表性的商用四极质谱计的线性、长期稳定性、短期稳定性、离子源参量及使用历史对灵敏度的影响等性能进行了实验研究,并分析了它们各自的计量特性与特点,其结论对四极质谱计的应用具有重要的参考价值。
The quadrupole mass spectrometers are used for analyzing residual gas and measuring the flux under the vacuum as one of the partial measurement apparatus,so it's metrological characteristics need to study further.This paper use three kinds pure gas N2、Ar、He to take experiments,And in order to analyse each apparatus metrological characteristics by studying linearity,stability,short term stability,the parameter of ion source and the using history,which apply widely and have some typical character.The conclusions have some vital references on applying the quadrupole mass spectrometers.
出处
《真空与低温》
2007年第4期222-228,239,共8页
Vacuum and Cryogenics
关键词
四极质谱计
线性
稳定性
计量特性
the quadrupole mass spectrometer
linearity
stability
metrological characteristics
