摘要
用有限元法对微重力环境下液封浮区(LEFZ)法生长的3英寸GaAs单晶中的热应力进行求解。假设晶体处于准定常状态且为轴对称的各向同性线弹性体。分析了液封厚度、晶体和进料棒转速对晶体中热应力分布的影响。
The thermal stress calculation for a 3 inch diameter gallium arsenide crystal grown by liquid encapsulation full floating zone(LEFZ) method under microgravity has been conducted by using the finite element numerical method.The crystal is assumed to be in a pseudo-steady axisymmetric state and to behave as isotropic linearly elastic body.The effect of the thickness of the encapsulant and the rotation rate of crystal and feed rod on the thermal stress is analyzed.【
出处
《材料科学与工程学报》
CAS
CSCD
北大核心
2007年第4期514-518,共5页
Journal of Materials Science and Engineering
基金
Supported by NSFC with Grant No.50376078