摘要
提出了一种优化石英晶体微天平(Quartz Crystal Microbalance ,简称QCM)结构、抑制寄生振动模的设计方法.用Ansys9 .0有限元软件直接对QCM进行三维有限元分析,从而避免了一般解析和半解析中对控制方程的简化.首先通过对QCM谐振频率收敛性的分析,验证了有限元计算的正确性;然后分析了不同电极尺寸对QCM振动及能陷情况的影响,并找到了较佳的电极尺寸;最后针对不同电极尺寸的QCM进行了液体测量实验,实验结果验证了基于有限元分析QCM电极尺寸设计方法的有效性.
The structure of QCM(Quartz Crystal Microbalance) can be optimally designed and spurious vibration modes can be restrained with a new design method. This method uses the 3D software of Ansys9.0 to analyze directly the coupled phenomenon of the structural and electric fields of QCM. This analysis avoids the oversimplification of the control equation in the normal analytic or semi-analytic analysis. Through the analysis of the convergence of the resonant frequency of QCM, the correctness of the finite element analysis is proved. Then the influences of different sizes of electrode on vibration of QCM and energy trapping are analyzed and an optimal size of electrode is discovered. Finally experiments of different sizes of electrode on liquids are made and the results prove this method effective.
出处
《传感技术学报》
CAS
CSCD
北大核心
2007年第10期2182-2186,共5页
Chinese Journal of Sensors and Actuators
基金
国家创新基金项目资助"石英晶体微天平"(06C26222200129)
关键词
QCM
振动模
有限元
能陷
QCM
vibration mode
finite element
energy trapping
