面向微粒操纵的介电泳芯片系统研究

Development of a Dielectrophoretic Chip System for Micro-Particle Manipulation

针对目前在纳米器件及传感器的制造中尚无对大量粒子进行有效操纵的方法,我们利用介电泳方法对大量微粒进行定位和传输操纵,介绍了利用MEMS工艺进行介电泳芯片加工的过程以及整个观测与实验系统的建立,通过有限元软件对传统介电泳和行波介电泳中电极阵列的电场分布进行求解,并在该实验系统下实现了对微通道中的悬浮高度和微粒的运动速度的测量.该实验系统的研究为液体环境下微纳颗粒的装配和分离提供了一条有效的技术路径.

Considering the lack of effective methods to perform the batch manipulation of micro/nano particles during the application of micro/nano sensors, channels, and devices, we present the dielectrophoretic method to localize and transport micro/nano particles using a specially design micro-chip. The fabrication process and design critria of the dielectrophoretic micro-chip is described, The electric field distribution was analyzed by FEM tool in order to obtain and predict the dielectrophoretic force in an actual experiment. Experiments were conducted using the micro-chip to dielectrophoretically manipulate micro-scale particles. The levitation height and movement speed of particles in the chip's micro channel were measured. We have shown that the micro-chip discussed provides an effective way for assembly and separation of micro particles in a fluidic environment.