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一种双自由度双级解耦微机械陀螺的特性分析 被引量：1

Characteristics of a 2-DOF and Doubly-Decoupled Micromachined Gyroscope
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摘要 为了降低微机械陀螺的机械耦合和改善工作稳定性,提出了一种新颖的双自由度双级解耦微机械陀螺.建立并求解了该陀螺的动力学方程,并从理论上分析了陀螺的系统特性.利用数值求解工具MATLAB模拟了陀螺的幅频特性,结果表明当品质因子从50变化到1 000时,平坦区带的幅度和相位变化很小.理论和模拟均证实了该陀螺在选择适当的工作区带时,能获得较高的工作稳定性. To reduce the mechanical couple and improve the operating stability of MEMS gyroscopes,a novel 2-DOF and doubly-decoupled mems gyroscope was presented.The dynamics equation of the gyroscope was built and solved. By analyzing the solution results,the system characteristics of sensitivity and bandwidth were discussed theoretically.The system characteristics were also researched by numerical method of MATLAB,the simulation results show that when the gyroscope operates in the flat region,the change of quality-factor from 50 to 1000 makes the alteration of amplitude and plase a little.Both the theoretical and simulation results validate that when the gyroscope operates in suitable frequency it can obtain high stability.
作者 陈伟平 韩天 王浩 陈宏 刘晓为
机构地区 哈尔滨工业大学MEMS中心
出处 《传感技术学报》 CAS CSCD 北大核心 2007年第11期2391-2394,共4页 Chinese Journal of Sensors and Actuators
关键词 MEMS 微机械陀螺 双自由度 解耦 MEMS micromachined gyroscope 2-DOF decoupling
分类号 TP212.12 [自动化与计算机技术—检测技术与自动化装置]
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参考文献7

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同被引文献12

  • 1Bernstein J, Cho S, King A T, et al. Micromachined comb-drive tuning fork rate gyroscope [C]//Proceed- ings of the IEEE Micro Electro Mechanical Systems-- An Investigation of Micro Structures, Sensors, Actu ators, Machines and Systems. Cambridge: IEEE, 1993: 143-148.
  • 2Alper S E, Azgin K, Akin T. A high-performance sillicon-on insulator MEMS gyroscope operating at at- mospheric pressure[J]. Sensors Actuators A: Physi- cal, 2007, 135(1): 34-42.
  • 3Ding Haitao, Liu Xuesong, Lin Longtao, et al. A high-resolution silicon on-glass Z axis gyroscope oper ating at atmospheric pressure[J]. IEEE Sensors Jour- nal, 2010, 10(6): 1066- 1074.
  • 4Aear C, Shkel A M. An approach for increasing drive-mode bandwidth of MEMS vibratory gyroscopes [J]. Journal of Microelectromechanical Systems, 2005, 14(3): 520-528.
  • 5Riaz K, Bazaz S A, Saleem M M, et al. Design, damping estimation and experimental characterization of decoupled 3-DoF robust MEMS gyroscope [J]. Sensors and Actuators A.. Physical, 2011, 172(1): 523-532.
  • 6Schofield A R, Trusov A A, Shkel A M. Inherently robust micromachined gyroscopes with 2-DOF sense- mode oscillator[J]. Journal of Microelectromechani- cal Systems, 2006, 15(2): 380-387.
  • 7Sahin K, Sahin E, Alper S, et al. A wide-bandwidth and high sensitivity robust microgyroscope[J]. Jour nal of Micromechanics and Mieroengineering, 2009, 19(1) : 1722-1726.
  • 8Trusov A A, Schofield A R, Shkel A M. Perform- ance characterization of a new temperature-robust gain-bandwidth improved MEMS gyroscope operated in air[J]. Sensors Actua- tors A: Physical, 2009, 155(1): 16- 22.
  • 9Schofield A R, Trusov A A, Shkel A M. Micromach- ined gyroscope concept allowing interchangeable oper- ation in both robust and precision modes[J]. Sensors Actuators A.. Physical, 2011, 165(1).. 35-42.
  • 10Wang Wei, Lv Xiaoyong, Sun Feng. Design of mi- crornachined vibratory gyroscope with two degree-of- freedom drive-mode and sense-mode[J]. IEEE Sen- sors Journal, 2012, 12(7) .. 2460-2464.

引证文献1

二级引证文献5

传感技术学报
2007年 第11期

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