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EB-PVD及其制备功能涂层的研究进展 被引量:4

EB-PVD Technology and Development in Preparing Protection Coatings
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摘要 介绍了电子束物理气相沉积(EB-PVD)设备的结构、工艺技术特点等,重点介绍了EB-PVD技术在制备各种防护涂层方面所取得的成果及研究进展。 The equipment configuration,process and technological characteristics of electron beam physical vapor deposition(EB-PVD) are introduced in this paper.Applied achievements and development in various protection coatings prepared by EB-PVD are recommended.
出处 《材料工程》 EI CAS CSCD 北大核心 2007年第z1期131-135,共5页 Journal of Materials Engineering
关键词 电子束物理气相沉积 涂层 热防护 EB-PVD coating thermal protection
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参考文献23

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二级参考文献16

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