摘要
介绍了电子束物理气相沉积(EB-PVD)设备的结构、工艺技术特点等,重点介绍了EB-PVD技术在制备各种防护涂层方面所取得的成果及研究进展。
The equipment configuration,process and technological characteristics of electron beam physical vapor deposition(EB-PVD) are introduced in this paper.Applied achievements and development in various protection coatings prepared by EB-PVD are recommended.
出处
《材料工程》
EI
CAS
CSCD
北大核心
2007年第z1期131-135,共5页
Journal of Materials Engineering