在位反应制备TiC涂层的动力学研究

Study on Kinetic Properties of TiC Coatings Prepared by in-Situ Reaction

以TiCl4(99.9%)为钛源,H2(99.99%)为载气和反应气体,Ar(99.99%)为保护和稀释气,石墨为基体和碳源,在位反应制备了TiC涂层。通过实验参数与沉积产物的重量变化,分析了该反应的控制因素,并研究了反应的动力学特点。

In the present paper,TiCl4(99.9%) was used as the source of Ti.H2(99.99%) was used as carrier and reaction gas.Ar(99.99%) was used as protective and diluent gas.Graphite was used as the source of carbon,and the as-prepared TiC coatings were prepared on the graphite by in-situ reaction.Rate-determining step and kinetic properties of the reaction were studied by the relations between experimental parameters and weight changes of deposition.