高精度热变形组合测量装置设计

Design of high-accuracy combined measuring apparatus of thermal deformation

针对传统测量装置成本高,易受环境影响,不易调试瞄准的缺陷,设计了新型高精度热变形组合测量装置。该装置以组合量块为标准,采用可换向的单测头和成本较低的电感测微仪进行定位测量。通过对测控温系统、运动系统、被测件支撑与调整系统、瞄准定位系统等主要误差源的精度分析,得出高精度热变形组合测量装置的测量极限误差为±0.99μm,可用于机械零部件热变形量及热膨胀系数的测量。

Aimed at overcoming the limitations conventional measuring apparatus,such as a higher cost,poorer stability,and harder debug,the paper introduce the new designs of the high-accuracy,combined measuring apparatus of thermal deformation.The new measurement system of thermal deformation adopts combined gauges as standard length,single switchable measuring head and inductance micrometers to carry on relative measurement.The precision of the combined measuring apparatus is realized by analyzing main error sources,such as temperature measurement system,movement system,support and adjustment system,collimate system and so on.It can be used to measure the coefficient of thermal expansion and thermal deformation size of machine parts.