摘要
电子产品高度集成化与高性能化发展,对超精表面及亚表面无损伤性要求越来越高。为实现纳米尺度分辨率、大视场表面损伤检测,利用原子力微悬臂探针设计了一种新型超精表面缺陷探测系统,采用柔性机构进行微悬臂探针俯仰与倾斜度微调,利用压电双晶片实现接触、非接触以及轻敲3种不同探测模式。系统特性实验表明:该探测系统位移分辨率可达2 nm,共振频率90 Hz,满足超精表面缺陷检测系统性能要求。
With the high density and high performance development on electronic products,non-traumatic superfinish surface and subsurface are expected more and more.In order to implementation of the nanometer resolution and large field range scratch detection,this study is conducted to develop a novel micro-detecting device for superfinish surface scratch,including a flexure framework to finish fine tuning.A laser optical fibre vibration meter is employed to evaluate the static and dynamic features of the micro-detecting device.The results show that the distance resolution reaches 2 nm and resonance frequency 90 Hz.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2005年第z1期65-68,共4页
Optics and Precision Engineering
基金
国家973项目"高性能电子产品设计制造精微化
数字化新原理和新方法"(No.2003CB716201)
关键词
微探头
柔性铰链
压电双晶片
激光干涉
micro-detecting device
flexure hinge
piezoelectric bimorph
laser interferometry
