摘要
采用新的二次阳极氧化工艺,制备了孔径为30～70 nm的阳极氧化铝(anodized Al2O3,AAO)膜。用扫描电镜和原子力显微镜观察了AAO膜孔洞的结构、形貌和它们的排列,发现制备的AAO铝膜的孔的纵横比大,孔分布有序,上下贯通,孔间相互平行,孔通道无交叉且有序。研究了电解液浓度、扩孔时间对膜孔半径的影响,建立了动力学模型,得出在一定时间内,孔径大小与电解液浓度之间呈对数关系,而与扩孔时间呈线性关系。根据电场理论,膜压应力值随扩孔时间增加趋向于表面张力值,当达到平衡后,膜孔孔径的大小随之确定。
A new anodic oxidation process to prepare anodized Al2O3(AAO) porous film was studied.Through scanning electron microscopy and atomic force microscopy to investigate the construction,appearance and arrangement of the pores,the pores were found to have a larger aspect ratio,ordered arrangement of pore distribution and to be well parallel and uncrossed.In the pore expan-sion process of the film,the effects of the electrolyte concentration and time of pore expansion on the pore diameter of the film aper-ture w...
出处
《硅酸盐学报》
EI
CAS
CSCD
北大核心
2008年第5期648-653,共6页
Journal of The Chinese Ceramic Society
基金
国家自然科学基金(10372087)
湖南省科技厅重点(03JZY1002)资助项目
关键词
氧化铝膜
电解液浓度
扩孔
动力学模型
alumina film
electrolyte concentration
pore expansion
kinetics model
