2鲍敏杭,沈绍群,胡澄宇,马青华,Chr.Burrer,J.Esteve,J.Bausells,S.Marco.硅各向异性腐蚀<110>条补偿图形腐蚀前沿控制[J].Journal of Semiconductors,1994,15(11):768-773. 被引量:11
二级参考文献11
1Philippe Helin, Makoto Mita, Tarik Bourouina, Gilbert Reyne, Hiroyuki Fujita Self-aligned micromachining process for large - scale, free - space optical cross - connects[J]. Journal of Lightwave Technology, 2000, 18(12):1786 - 1791.
2Chen R T, Nguyen H, Wu M C. A high speed low -voltage stress- induced micromachined 2x2 optical switch[J].IEEE Photonics Technology Letters, 1999, 11(11):1396 - 1398.
3Lee S S, Huang L S, Kim C J, et al. Free - space fiberoptic switches based on MEMS vertical torsion mirrors[J].Journal of Lightwave Technology, 1999, 17(1) : 7 - 13.
4Hiroshi Toshiyoshi, Hiroyuki Fujita. Electrostatic micro torsion mirrors for an optical switch matrix[J]. Journal of Microelectromechanical Systems,1996,5(4):231-237.