纳米级氧化铟锡复合粉体的制备及其性能

Preparation and Characterization of Nanosize Indium-Tin-Oxide Composite Powder

采用化学共沉淀法制备纳米级氧化铟锡复合粉体前驱物,煅烧得到纳米级氧化铟锡(ITO)复合粉体,用TG-DTA,XRD,TEM,ICP-AES,XRF和BET研究了纳米级ITO复合粉体的性能。前驱物铟锡氢氧化物的分解温度为291.5℃,300℃下烧结即可得到立方结构的ITO结晶粉体,Sn嵌入到In2O3晶格中,形成单相的ITO固溶体颗粒。随着温度的升高,ITO固溶体颗粒结晶更完全,晶粒长大。前驱物铟锡氢氧化物分别在600℃,800℃和900℃煅烧4h得到粒度均匀、分散性好、粒径为20nm^30nm的类球形ITO复合粉体。600℃煅烧得到的ITO复合粉体的纯度为99.995%,配比为In2O3:90.045%,SnO2:9.955%,比表面积为50.88m2/g。该粉体烧结活性高,将该粉体用简单的烧结工艺在1000℃烧制的ITO靶材相对理论密度达到99.25%。

The nanosized indium tin complex oxide powders were obtained by sintering the prepared indium tin hydroxide, which were synthesized by the chemical co-precipitation method. Characterization of the Complex powders were studied by using TG-DTA, XRD, TEM, ICP-AES, XRF and BET. The results show that the decomposition temperature of the indium tin hydroxide powders is 291.5°C. The cubic phase of ITO powders are obtained at 300°C, which the tin atom entered into the crystal lattice of cubic In2O3. With the increase of the sintering temperature, the crystals of ITO complex oxides become more perfect and the crystal size becomes bigger. After the indium tin hydroxide is sintered at 600°C, 800°C and 900°C for 4 h, respectively, the ITO powders are obtained, the particles being spherical shape and the size being in the range of 20 nm-30 nm. The particles have good dispersibility. The purity of the ITO powders detected by ICP-AES is 99.995%. The In2O3/SnO2 mixture ratio in the ITO powders detected by X-ray fluorescence spectrometry (XRF) is 90.045%/9.955%. The specific surface area of the ITO powders is 50.88 m2/g. When the ITO target is prepared by using the ITO powders on that condition simple sintering technique with the temperature of 1000°C, its relative density comes to 99.25%, which confirms that the ITO powders have higher sintering activity.