摘要
早期的测厚仪的电气控制部分由电子分立元件构成,温漂大、精度低、测量性能差、稳定性差、维修难度大。介绍一种采用工业控制计算机改造早期测厚仪的方法及原理,以及所取得的优良性能。
Early thickness measure instrument(TMI) is composed of scission component.It has a large drift of temperature and weak measure performance and poor stability and difficulty in maintenance.The remodeling method and principle of inchoate thickness measure instrument(TMI),together with the acquired excellent performance were discussed in detail.
出处
《稀有金属》
EI
CAS
CSCD
北大核心
2006年第z1期98-100,共3页
Chinese Journal of Rare Metals
关键词
测厚仪
工控机
测量
thickness measure instrument(TMI)
computer for industrial control
measure