用传输矩阵方法研究多层介质增透膜的透射特性

Study of multi-layer antireflection coating by using character matrix of multi-layer dielectric film

利用麦克斯韦方程组和边界条件,推导出由高低折射率介质组成周期性的多层增透膜系的传输矩阵,用传输性矩阵求出增透膜系的反射率和透射率表示式,采用Maple语言和数值计算方法得到4层和8层高反射膜系的反射率随入射光波长变化曲线,分析和讨论入射光的入射角对反射率和透射率的影响。得到的结果有利于对多层介质增透膜系结构的理解,为光学仪器镀膜的设计提供了理论依据。

Based on the Maxwell equation set and the boundary condition the character matrix of multi-layer anti-reflection coating which is made up of the high and low refractive index dielectric film alternatively is deduced. Using the character matrix the reflectance and transmittance of the multi-layer anti-reflection coating is required. The curve in which the reflectance varies with the wavelength of the incident light is obtained by using Maple language and numerical calculation method. The influence of the different angle of incident on the reflectance is analyzed in detail. The obtained result is useful for understanding the structure of multi-layer anti-reflection coating and provided the theory foundation for improving the performance of antireflection optics instrument.