力敏传感器专用工艺装备研究

Force transducer encapsulation equipment research and development

“力敏传感器专用工装设备”研究是国家关于“传感器产业化技术”研究的重大项目之一,是研制、开发和生产高性能传感器的技术保障。其工艺水平的高低直接决定传感器产品的性能和质量。本文从攻关解决的关键技术、创新点、技术水平及对我国传感器产业技术进步的影响、知识产权等角度介绍力敏传感器科研生产所必需的几台关键设备的攻关成果及所取得的技术水平和主要成绩。

Force Transducer Encapsulation Equipment is one of the key projects of National Transducer Industrialization Technology and it is the pre-requisite of high performance transducers.In this paper we focus on the key technology and innovative design of some major equipment needed for the production of force transducers, and their influence on technology advancement of the transducer industry.